Active Vibration Isolation Systems
- KLA STYLUS PROFILER ALPHA-STEP D-600
- BRUKER AFM MULTIMODE
- DOWNLOAD
KLA STYLUS PROFILER
ALPHA-STEP D-600
The measured vertical floor vibration exceeded the floor vibration specification VC-D below 10 Hz and 16 Hz. The DVIA-T45 active vibration isolation system reduced the vertical floor vibration from VC-B to VC-E.
BRUKER AFM MULTIMODE
| Test Result Summary | |||
|---|---|---|---|
| Frequency Range | 1 - 80 Hz | ||
| Floor Vibration Specification | VC-D | ||
| Measurement Direction | Z-axis (Vertical) |
X-axis (Left to Right) |
Y-axis (Front to Back) |
| Floor Vibration | Fail | Fail | Fail |
| Vibration On Active Vibration Isolation System | Pass | Pass | Pass |
The measured vertical floor vibration exceeded the floor vibration specification at 3.15 Hz and 8 Hz to 50 Hz. The DVIA-T45 active vibration isolation system reduced the vertical floor vibration from VC-B to VC-F.
The measured X-axis floor vibration exceeded the floor vibration specification at 5 Hz. The DVIA-T45 active vibration isolation system reduced the X-axis floor vibration from VC-C to VC-F
The measured Y-axis floor vibration exceeded the floor vibration specification at 2.5 Hz and 12.5 Hz. The DVIA-T45 active vibration isolation system reduced the Y-axis floor vibration from VC-C to VC-F.
DAEIL SYSTEM DVIA MB1000 FEI HELIOS G4 UC DualBeam STEM- DAEIL SYSTEM DVIA MB1000 HITACHI SEM SU1510
- DAEIL SYSTEM DVIA MB1000 HITACHI SEM SU8000
- DAEIL SYSTEMS DVIA MB1000 Raith EBL&SEM Pioneer Two
- DAEIL SYSTEMS DVIA MB1000 TESCAN LYRA3 FIB SEM
- DAEIL SYSTEMS DVIA MB1000 ZEISS FE SEM SIGMA 300 VP
- DAEIL SYSTEMS DVIA MB1000 ZEISS Gemini SEM
- DAEIL SYSTEMS DVIA MB1000 ZEISS SEM EVO 15
- DAEIL SYSTEMS DVIA MC 3000 OMICRON STM
- DAEIL SYSTEMS DVIA MB1000 FEI FIB SEM Scios 2
- DAEIL SYSTEMS DVIA MC 3000 FEI TEM TECHNAI G2 F20
- DAEIL SYSTEMS DVIA MC1000 BRUKER NMR Ascend 400