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DAEIL SYSTEMS

DAEIL SYSTEMS

Thermo Fisher Scientific Spectra 300 TEM
DVIA-MB3000 Installation Report

Installation Reports

Overview

  • The DVIA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended

Vibration Isolation System Information

  • Model: DVIA-MB3000
  • Serial Number: 231113R4-1

Engineer

Chaewon Lee from DAEIL SYSTEMS

Tuning Date

April 15, 2024

Number of Tuning Trial

2nd tuning

Location

Hainan, China

Equipment

Thermo Fisher Spectra 300

Equipment Condition

The equipment is installed / IDLE

Tuning Request

Equipment allowable vibration

VC-D

Data and Image

Vertical Transmissibility

240415-thermo-fisher-spectra-300-vertical-transmissibility-1

Left to Right Transmissibility

Front to Back Transmissibility

Equipment picture

Reference

Generic Vibration Criteria

Vibration Level Classification Description Vibration Allowance Criteria
Amplitude1)
µm/s (µin/s)
Precision2)
µm
Workshop (ISO) Level where people can clearly feel vibrations, suitable for workshops and other non-sensitive areas. 800 (32,000) N/A
Office (ISO) Level where people can feel vibrations, suitable for general office environments and places where vibrations are not a major concern. 400 (16,000) N/A
Residential Area (ISO) Level difficult for people to perceive, suitable for sleeping areas. Also suitable for computers, hospital recovery rooms, semiconductor probe test equipment, and microscopes with magnification below 40X. 200 (8,000) 75
Operating Theatre (ISO) Level where people cannot perceive vibrations, suitable for surgical equipment and microscopes with magnification below 100X. 100 (4,000) 25
VC-A Level suitable for optical microscopes with magnification below 400X, precision scales, and projection aligners. 50 (2,000) 8
VC-B Level suitable for inspection equipment such as lithography with a linewidth below 3 μm and steppers. 25 (1,000) 3
VC-C Level suitable for optical microscopes with magnification below 1000X, lithography and inspection equipment with precision below 1 μm (less sensitive electron microscopes), and TFT-LCD steppers/scanners. 12.5 (500) 1 - 3
VC-D Level suitable for high-spec electron microscopes (SEMs, TEMs), E-Beam systems, etc. 6.25 (250) 0.1 - 0.3
VC-E Level suitable for laser systems with long beam paths or extremely sensitive equipment such as nanometer-scale E-Beam lithography. 3.12 (125) < 0.1
VC-F Level suitable for ultra-precision research facilities. Achieving this vibration level is difficult in most places (especially cleanrooms). This is a standard for evaluating vibration levels rather than a design standard. 1.56 (62.5) N/A
VC-G Level suitable for ultra-precision research facilities. Achieving this vibration level is difficult in most places (especially cleanrooms). This is a standard for evaluating vibration levels rather than a design standard. 0.78 (62.5) N/A
  • 1) VC-A through VC-B represent amplitude values measured in octave bands from 8-80Hz, while VC-C through VC-G represent amplitude values measured in octave bands from 1-80Hz.
  • 2) In the field of microelectronics, precision refers to the linewidth, and in the medical field, it refers to particle size.