Installation Reports
Overview
- The DVIA-MB3000 active vibration isolation platform is appropriately installed and functioning as intended
Vibration Isolation System Information
- Model: DVIA-MB3000
- Serial Number: 231113R4-1
Engineer
Chaewon Lee from DAEIL SYSTEMS
Tuning Date
April 15, 2024
Number of Tuning Trial
2nd tuning
Location
Hainan, China
Equipment
Thermo Fisher Spectra 300
Equipment Condition
The equipment is installed / IDLE
Tuning Request
Equipment allowable vibration
VC-D
Data and Image
Vertical Transmissibility
Left to Right Transmissibility
Front to Back Transmissibility
Equipment picture
Reference
Generic Vibration Criteria
| Vibration Level Classification | Description | Vibration Allowance Criteria | |
|---|---|---|---|
| Amplitude1) µm/s (µin/s) |
Precision2) µm |
||
| Workshop (ISO) | Level where people can clearly feel vibrations, suitable for workshops and other non-sensitive areas. | 800 (32,000) | N/A |
| Office (ISO) | Level where people can feel vibrations, suitable for general office environments and places where vibrations are not a major concern. | 400 (16,000) | N/A |
| Residential Area (ISO) | Level difficult for people to perceive, suitable for sleeping areas. Also suitable for computers, hospital recovery rooms, semiconductor probe test equipment, and microscopes with magnification below 40X. | 200 (8,000) | 75 |
| Operating Theatre (ISO) | Level where people cannot perceive vibrations, suitable for surgical equipment and microscopes with magnification below 100X. | 100 (4,000) | 25 |
| VC-A | Level suitable for optical microscopes with magnification below 400X, precision scales, and projection aligners. | 50 (2,000) | 8 |
| VC-B | Level suitable for inspection equipment such as lithography with a linewidth below 3 μm and steppers. | 25 (1,000) | 3 |
| VC-C | Level suitable for optical microscopes with magnification below 1000X, lithography and inspection equipment with precision below 1 μm (less sensitive electron microscopes), and TFT-LCD steppers/scanners. | 12.5 (500) | 1 - 3 |
| VC-D | Level suitable for high-spec electron microscopes (SEMs, TEMs), E-Beam systems, etc. | 6.25 (250) | 0.1 - 0.3 |
| VC-E | Level suitable for laser systems with long beam paths or extremely sensitive equipment such as nanometer-scale E-Beam lithography. | 3.12 (125) | < 0.1 |
| VC-F | Level suitable for ultra-precision research facilities. Achieving this vibration level is difficult in most places (especially cleanrooms). This is a standard for evaluating vibration levels rather than a design standard. | 1.56 (62.5) | N/A |
| VC-G | Level suitable for ultra-precision research facilities. Achieving this vibration level is difficult in most places (especially cleanrooms). This is a standard for evaluating vibration levels rather than a design standard. | 0.78 (62.5) | N/A |
- 1) VC-A through VC-B represent amplitude values measured in octave bands from 8-80Hz, while VC-C through VC-G represent amplitude values measured in octave bands from 1-80Hz.
- 2) In the field of microelectronics, precision refers to the linewidth, and in the medical field, it refers to particle size.