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  • 160302R12 DVIA-M 1000 ZEISS EVO 18 SEM

    • 160302R12 DVIA-M 1000 ZEISS EVO 18 SEM

    Case Studies

    1. Measurement Details
    2. Equipment Information
    3. Vibration Isolation System
    4. Installation Photo
    5. Summary
    6. Results – RMS Auto spectrum
    7. Results – Active Off vs Active On

    1. Measurement Details

    • Measurement Date
      May 24, 2016
    • Measurement Devices
      1. LAN-XI Data Acquisition Hardware
      – Brüel & Kjæ r 3050-A-040 (Serial Number: 3050-111438)
      2. Data Analysis Software
      – Brüel & Kjæ r PULSE LAB SHOP 14
      3. Sensors
      – PCB Accelerometer
      – Model: 393B05 (Serial Number: 48995, 40626)
    • Measurement Location
      1st Floor
    • Measurement Setup
      Bandwidth: 0 – 100 Hz
      Lines: 400
      Window: Hanning
      Averaging: Fast Fourier Transform Spectrum Averaging
      Amplitude Units: m/s2
      Spectral Unit: RMS

    2. Equipment Information

    • Manufacturer
      ZEISS
    • Model
      EVO 18 SEM
    • Floor Vibration Specification
      The manufacturer specifies that allowable vibration values are less than 6μm/s RMS up to 30 Hz and less than 12 μm/s RMS above 30 Hz. Unless otherwise stated, requirements should be assumed to be in three orthogonal axes and in third octaves between 1Hz and 80Hz.

    3. Vibration Isolation System Information
    Model: DVIA-MB1000

    DVIA-MB Base Active Vibration Isolation Platform
    Platform Dimensions 1140 x 910 x 224 mm
    Load Capacity 500 - 1700 kg
    Actuator Electromagnetic Actuator
    Maximum Actuator Force Vertical: 40N, Horizontal: 20 N
    Degrees of Freedom 6 degrees
    Active Isolation Range 0.5 - 100 Hz
    Vibration Isolation at 2 Hz ≥90%
    Vibration Isolation at 10 Hz ≥99%
    Input Voltage (V) AC100 - 240V / 50 - 60 Hz / 1A
    Power Consumption (W) Maximum 110W, <50 W in normal operation
    Operating Range Temperature (°C) 5 - 50 °C
    Humidity (%) 20 - 90%
    Required Air Pressure ≥ 0.5 MPa (5 bar)

    4. Installation Photos

    5. Summary

    Floor Vibration Specification
    Frequency Range 1 - 30 Hz Above 30 Hz
    Allowable Vibration Values 6 μm/s RMS 12 μm/s RMS
    Measurement Direction Z axis (Vertical) X axis (Left to Right) Y axis (Front to Back) Z axis (Vertical) X axis (Left to Right) Y axis (Front to Back)
    Floor Fail Fail Fail Pass Pass Pass
    On Active Vibration Isolation System Pass Pass Pass Pass Pass Pass

    6. Results
    Z-axis (Vertical)

    160302R12 DVIA-M 1000 ZEISS EVO 18 SEM z-axis-vertical

    X-axis (Left to Right)

    160302R12 DVIA-M 1000 ZEISS EVO 18 SEM x-axis-left-to-right

    Y-axis (Front to Back)

    160302R12 DVIA-M 1000 ZEISS EVO 18 SEM y-axis-front-to-back

    7. Results – Active Off vs Active On

    160302R12 DVIA-M 1000 ZEISS EVO 18 SEM Active Vibration Isolation OFF

    Active Vibration Isolation Off
    110K

    160302R12 DVIA-M 1000 ZEISS EVO 18 SEM Active Vibration Isolation ON

    Active Vibration Isolation On
    110K

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