DVIM-M Series
Standard Pneumatic Vibration Isolator
- Overview
- Features
- Performance
- Specifications
- Options
- Order
- Resources
The DVIM-M series is a standard pneumatic vibration isolator, intergrated with a built-in damping system as to
minimize its size and offer a fast settling time.
Dual Chamber Design
for Highest Damping Level
The dual chamber system of the DVIM-M series consists of an air chamber and a damping chamber connected by two
orificies : variable orifice and internal orifice. The variable orifice located outisde of the chambers and the internal
orifice located inside the chambers. These orificies control air flow between the chamberes to increase damping
efficiency and reduces its settling time. As the high forces of stage accelaration occur,
the air chamber makes a restoring force and air flows into the damping chamber through
the orifices. These orifices dissipate energy in the air, effectively damping the system.
High Performance Leveling Valve
The standard leveling vales with repeatability of ±0.1 mm and the precision leveling valves with repeatability of ±0.05 mm.
The precision leveling valves are recommended if both the releveling accuracy and the settling time are required.
Built-in Oil Damper to Support Metrology Equipment with Linear Stage
The built-in oil dampers are integrated in the DVIM-M series, dampening and minimizing disturbances caused by the linear
stage motions. Unfortuantely, there is a trade-off between the resonant frequency and damping efficiency. As damping is
increased, the fast settling time is acheived however, the resonant frequency of the DVIM-M isolators shift slightly higher
and the efficiencyof vibration isolation performance is decreased.
80 – 90% vibration isolation at 10 Hz
(Without Damper)
| Vibration Isolation System | Pneumatic Isolation System | ||||||||||||
| Load Capacity | 100–60000 kg | ||||||||||||
| Resonant Frequency | 2.5–4.0 Hz | ||||||||||||
| Vibration Isolation at 10 Hz | 80–90% (Without Oil Damper) | ||||||||||||
| Automatic Leveling | Yes | ||||||||||||
| Accuracy of Leveling Repeatability | ±1.0 mm for Standard Leveling Valve ±0.05 mm for Precision Leveling Valve |
||||||||||||
Built-In Oil Damper
Better Stability & Faster Settling Time
The built-in oil damper option is installed with stoppers to limit the linear stage from moving beyond certain stroke range
in the three horizontal directions. The built-in oil damper option provide high level of damping by an oil inside the dampers.
The higher the visocosity of the oil, the stiffer pneumatic vibration isolators which leads to shorten the settling time and
increases the stability of the systembut the transmissibility roll-off rate decreases.
| Model | Dimensions (Floating) L x W x H (mm) |
Dimensions (Deflated) L x W x H (mm) |
Location of Bolt Hole P x P (mm) |
Weight Per Isolator (kg) |
Maximum Load Capacity Per Isolator (kg) |
Diameter of Bolt Hole (⌀) |
|---|---|---|---|---|---|---|
| DVIM-M-100 | 180 x 180 x 150 | 180 x 180 x 144 | 160 x 160 | 11 | 100 | 10 |
| DVIM-M-300 | 200 x 200 x 150 | 200 x 200 x 144 | 180 x 180 | 16 | 300 | 10 |
| DVIM-M-600 | 240 x 240 x 170 | 240 x 240 x 164 | 210 x 210 | 20 | 600 | 10 |
| DVIM-M-900 | 270 x 270 x 190 | 270 x 270 x 184 | 240 x 240 | 35 | 900 | 14 |
| DVIM-M-1200 | 290 x 290 x 190 | 290 x 290 x 184 | 260 x 260 | 43 | 1200 | 14 |
| DVIM-M-1500 | 320 x 320 x 190 | 320 x 320 x 184 | 290 x 290 | 50 | 1500 | 14 |
| DVIM-M-2000 | 370 x 370 x 190 | 370 x 370 x 184 | 340 x 340 | 56 | 2000 | 18 |
| DVIM-M-2500 | 390 x 390 x 190 | 390 x 390 x 184 | 360 x 360 | 63 | 2500 | 18 |
| DVIM-M-3000 | 440 x 440 x 190 | 440 x 440 x 184 | 410 x 410 | 80 | 3000 | 18 |
| DVIM-M-4500 | 450 x 450 x 190 | 450 x 450 x 184 | 420 x 420 | 85 | 4500 | 18 |
| Model | Dimensions (Floating) L x W x H (mm) |
Dimensions (Deflated) L x W x H (mm) |
Location of Bolt Hole P x P (mm) |
Weight Per Isolator (kg) |
Maximum Load Capacity Per Isolator (kg) |
Diameter of Bolt Hole (⌀) |
|---|---|---|---|---|---|---|
| DVIM-M-100D | 180 x 180 x 150 | 180 x 180 x 144 | 160 x 160 | 11 | 100 | 10 |
| DVIM-M-300D | 200 x 200 x 150 | 200 x 200 x 144 | 180 x 180 | 16 | 300 | 10 |
| DVIM-M-600D | 240 x 240 x 170 | 240 x 240 x 164 | 210 x 210 | 20 | 600 | 10 |
| DVIM-M-900D | 270 x 270 x 190 | 270 x 270 x 184 | 240 x 240 | 35 | 900 | 14 |
| DVIM-M-1200D | 290 x 290 x 190 | 290 x 290 x 184 | 260 x 260 | 43 | 1200 | 14 |
| DVIM-M-1500D | 320 x 320 x 190 | 320 x 320 x 184 | 290 x 290 | 50 | 1500 | 14 |
| DVIM-M-2000D | 370 x 370 x 190 | 370 x 370 x 184 | 340 x 340 | 56 | 2000 | 18 |
| DVIM-M-2500D | 390 x 390 x 190 | 390 x 390 x 184 | 360 x 360 | 63 | 2500 | 18 |
| DVIM-M-3000D | 440 x 440 x 190 | 440 x 440 x 184 | 410 x 410 | 80 | 3000 | 18 |
| DVIM-M-4500D | 450 x 450 x 190 | 450 x 450 x 184 | 420 x 420 | 85 | 4500 | 18 |
