Built-In Active Vibration Isolation System
DVIA-M Series
Nanoscale Imaging Without Noise
- Overview
- Features
- Performance
- Specifications
- Applications
- Resources
The DVIA-M is the most advanced built-in active vibration isolation system in the world, incorporated in various platforms and used as a built-in active vibration isolation system inside electron microscopes.
Sub-Hertz Vibration Isolation Performance
The most sophisticated active vibration control algorithms are embedded in the DVIA-M series,
delivering 50% - 80% vibration isolation at 1 Hz and and 90% vibration isolation at 2 Hz in six degrees of freedom.
Built-In Active Vibration Isolation System
The DVIA-M active vibration isolators are designed as a built-in active vibration isolation system
for nanoscale imaging equipment such as electron microscopes.
Feedback & Feedfoward Control Algorithm
The DVIA series uses the Feedback control algorithm to continuously detect vibrations disturbing an isolated
surface and instantaneously react to minimize the vibrations in real-time. The Feed-Forward control algorithm
is employed in the DVIA Series to filter out floor vibrations in advance before the floor vibrations can be
transmitted to equipment installed on the active vibration isolation systems.
Active Vibration Isolation in
All Six Degrees of Freedom
The DVIA Series controls vibrations in three translational degrees of motions
( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).
50% - 80% vibration isolation at 1 Hz
≥90% vibration isolation at ≥2 Hz
| Model | DVIA-M1000 | DVIA-M3000 | DVIA-M6000 | ||||||
|---|---|---|---|---|---|---|---|---|---|
| Isolator Dimensions (L x W x H) | 190 x 190 x 178 mm | 232 x 232 x 180 mm | 308 x 308 x 180 mm | ||||||
| Load Capacity | 500 - 1700 kg | 1500 - 3500 kg | 3000 - 6000 kg | ||||||
| Actuator | Electromagnetic Actuator | ||||||||
| Maximum Actuator Force | Vertical: 40 N, Horizontal: 20 N | Vertical: 80 N, Horizontal: 40 N | |||||||
| Degrees of Freedom | 6 degrees | ||||||||
| Active Isolation Range | 0.5 - 100 Hz | ||||||||
| Vibration Isolation at 1 Hz | 50% - 80% | ||||||||
| Vibration Isolation at ≥2 Hz | ≥ 90% | ||||||||
| Input Voltage (V) | AC100 - 240V / 50 - 60 Hz / 1A | ||||||||
| Power Consumption (W) | Maximum 110W, <50 W in normal operation | ||||||||
| Operating Range | Temperature (°C) | 5 - 50 °C | |||||||
| Humidity (%) | 20 - 90% | ||||||||
| Required Air Pressure | ≥ 0.5 MPa (5 bar) | ||||||||
Scanning Electron Microscopy
Transmission Electron Microscopy
Scanning Transmission Electron Microscopy
Scanning Tunneling Electron Microscopy