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DAEIL SYSTEMS

DAEIL SYSTEMS
  • DAEIL SYSTEMS
  • Products
  • Active Vibration Isolation Systems

    • Active Vibration Isolation Systems

    DAEIL SYSTEMS offers a wide range of active vibration isolation systems based on metrology equipment’s specifications.

    We provide a tabletop platform for light weight metrology equipment, a base platform for heavy electron microscopes and active isolators with concrete structures for semiconductor metrology equipment.

    DVIA-T Tabletop Active Vibration Isolation Platform

    DVIA-T Series

    Tabletop Active Vibration Isolation System

    • Tabletop platform
    • 40 – 80% vibration isolation at 1 Hz
    • Maximum Load Capacity: 150 kg (Optional)
    • Passive system: metal spring isolation
    • Plug N play (No air, Only AC power required)
    • Compact & light weight design
    • Feedback & Feed-forward vibration control algorithms
    DVIA-M Built-In Active Vibration Isolation System

    DVIA-M Series

    Built-In Active Vibration Isolation System
    for Nanoscale Imaging

    • Built-In Active Vibration Isolation System
    • 50 – 80% vibration isolation at 1 Hz
    • Maximum Load Capacity: 6000 kg
    • Passive system: pneumatic vibration isolation
    • Feedback & Feed-forward vibration control algorithms
    DVIA-ML Series Active Vibration Isolation System for Electron Microscopes

    DVIA-ML Series

    Low-Profile Active Vibration Isolation System

    • Low-Profile platform
    • 80 – 90% vibration isolation at 1 Hz
    • Maximum Load Capacity: 1700 kg
    • Passive System: Pneumatic spring
    • Feedback & Feedforward control
    DVIA-MB Series Active Vibration Isolation for Electron Microscopes

    DVIA-MB Series

    Base Active Vibration Isolation Platform ​

    • Base platform
    • 50 – 80% vibration isolation at 1 Hz
    • Maximum Load Capacity: 6000 kg
    • Passive system: pneumatic vibration isolation
    • Feedback & Feed-forward vibration control algorithms
    DVIA-MO Series Active Vibration Isolation Optical Table

    DVIA-MO Series

    Active Vibration Isolation Optical Table

    • Optical table platform
    • 50 – 80% vibration isolation at 1 Hz
    • Maximum Load Capacity: 6000 kg
    • Passive system: pneumatic vibration isolation
    • Feedback & Feed-forward vibration control algorithms
    DVIA-U Modular Active Vibration Isolation Platform

    DVIA-U Series

    Modular Active Vibration Isolation Platform

    • Modular platform
    • ≥90% vibration isolation at ≥4 Hz
    • Maximum Load Capacity: 700 kg
    • Passive system: metal spring vibration isolation
    • Plug N play (No air, Only AC power required)
    • Feedback & Feed-forward vibration control algorithms
    DVIA-UD DESK ACTIVE VIBRATION ISOLATION PLATFORM

    DVIA-UD Series

    Desk Active Vibration Isolation Platform

    • Desk platform
    • ≥90% vibration isolation at ≥4 Hz
    • Maximum Load Capacity: 700 kg
    • Passive system: metal spring vibration isolation
    • Plug N play (No air, Only AC power required)
    • Ergonomic design for seated users
    • Feedback & Feed-forward vibration control algorithms
    DVIA-UB Series - LOW-PROFILE SEM BASE PLATFORM

    DVIA-UB Series

    Base Active Isolation Platform

    • Base platform
    • ≥90% vibration isolation at ≥4 Hz
    • Maximum Load Capacity: 700 kg
    • Passive system: metal spring vibration isolation
    • Low-profile design for limited space
    • Plug N play (No air, Only AC power required)
    • Feedback & Feed-forward vibration control algorithms
    DVIA-P Active Pneumatic Vibration Isolation System

    DVIA-P Series

    Active Pneumatic Vibration Isolation System

    • 40 – 70% vibration isolation at 2 Hz
    • Maximum Load Capacity: 50000 kg
    • Passive system: Pneumatic vibration isolation
    • Designed to isolate semiconductor metrology equipment
    • Powerful pneumatic servo valve actuator
    • Feedback & Feed-forward vibration control algorithms