The whole new active vibration isolation system that you've been waiting for.
DAEIL SYSTEMS introduces the DVIA-MLP1000, the world's most advanced active vibration isolation system designed specifically for Scanning Electron Microscopes (SEMs).
The DVIA-MLP1000 sets a new standard in active vibration control, offering vibration controlled environments for high-end SEMs.
Four active vibration isolators are custom designed to securely bolt the base frame of the SEMs. Each of these isolators has a top plate with two through holes that match the caster holes on the base frame.
The DVIA-MLP1000, measuring 874 x 846 x 158 mm, is designed to fit perfectly with Thermo Fisher SEMs. Its low-profile design allows the microscope to sit directly on the system, resulting in a minimal overall height increase. This adaptability makes it ideal for the users in space-constrained environ-ments and inside enclosures without modi-fi cation while also maintaining the micro-scope's ergonomics for the users.
Casters can be attached to four sides of the DVIA-MLP1000 platform, provding enhanced mobility and ease of movement. This design allows the platform to be easily maneuvered in various directions, facilitating transportation and positioning in different installation sites. The ability to attach casters on all sides ensures that the platform can be smoothly rolled across surfaces, reducing the effort required to move it.
The DVIA-MLP1000 uses a pneumatic spring system with a low resonant frequency below 5 Hz, improving isolation performance at low frequencies. Most systems struggle to isolate vibrations below 5 Hz due to their passive isolator with a high resonant frequency and only employ feedback algorithm. However, the DVIA-MLP combines the isolator's low resonant frequency with feedback and feedforward algorithms to ensure superior isolation. The result is that the DVIA-MLP1000 is ideal for SEM and dual beam applications with strict vibration requirements.
The DVIA-MLP1000 system incorporates eleven highly senstive Geophone sensors with the excellent low frequency response starting at 0.3 Hz and eight electromagnetic actuators. These components are delicately designed to accurately measure and cancel out vibrations. This configuration combined with the advanced embedded feedback and feedforward control algorithms, enables the active vibration isolation system to meet the stringent vibration specification VC-G below 2 Hz.
The new tuning software of the DVIA-MLP1000 offers more filters and gains, improving vibration control. The number of filter slot has increased from 3 to 5, allowing for precise active vibration isolation tuning. The new feedforward D gain and D frequency provide excellent stability for tuning below 10 Hz and can attenuate vibrations below 0.5 Hz. The tuning software provides the open-loop transfer function from 0.1 Hz, enabling accurate phase margin checks for superior low-frequency vibration isolation.
The feedback control system constantly measures the isolated mass vibration and utilizes the electromagnetic actuators to create an equal and opposite force to attenuate vibration on the isolated mass. Although the isolation system works well out of the box, tuning the feedback open loops optimizes the isolation performance by adjusting the gains based on the isolated mass and using the new and advanced notch filters for accounting for structural resonances or vibration sources.
The feedforward control uses real-time ground sensor measurements to detect vibration and sends a signal to the actuators to cancel floor vibration before floor vibration transmitting to the isolated mass. DVIA-MLP1000 feedforward control dramatically improves the vibration isolation performance. With the dynamic control, the feedforward control easily adapts to the changing vibration level in facilities and does not require constant re-tuning to deliver the outstanding performance.
Active Vibration Isolation in
All Six Degrees of Freedom
The DVIA Series controls vibrations in three translational degrees of motions
( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).
Performance
DVIA-MLP1000 starts to isolate vibration from 0.5 Hz, providing 80 – 90% vibration isolation at 1 Hz.
Specifications
Find all contact information for DAEIL SYSTEMS.
If you have any questions, require technical assistance or want to provide feedback, contact us.
We’d love to hear you out.