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    DVIA-ML Series

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    DVIA-ML1000 Main image

    The world's most advanced
    active vibration isolation system

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Introduction

The world's most advanced
active vibration isolation system

The DVIA-ML series, equipped with state-of-the-art hardware and software, including advanced sensors, real-time data processing, and adaptive control algorithms, is the world's most advanced active vibration isolation system. It provides a fully controlled vibration environment, meeting the most difficult vibration requirements for electron microscopes that other systems cannot.

01
Advanced sensors
02
Real-time data processing
03
Adaptive control algorithms
Total Costom Design.
DVIA-ML3000 for Thermo Fisher Glacios2
(TECNAI TF20)DVIA-ML3000
DVIA-ML3000 for Thermo Fisher Tecnai TF20
(Krios G4)DVIA-ML3000
DVIA-ML3000 for Thermo Fisher Krios G4
(Spectra)DVIA-ML3000
DVIA-ML3000 for Thermo Fisher Spectra
(JEM-F200(JEOL))DVIA-ML3000
DVIA-ML3000 for JEOL JEM-F200
DVIA-ML series.
Custom design.
Superior performance.
DVIA-ML series.
Custom design.
Superior performance.
Features

Fully customizable design options
for all commercial electron microscopes

We offer the custom-designed DVIA-ML platforms tailored to the specific requirements
and specifications of electron microscopes.

Advanced Vibration Isolation
Custom Design
Low-Profile Platform
High-Sensitivity
Sensors
Low-Frequency
Signal Amplification
Minimal Magnetic Field
Interference

DVIA-ML3000 for Glacios 2
(Thermo Fisher TEM equipment)

DVIA-ML3000 for Glacios 2
[ 45-degree view ]
DVIA-ML3000 for Glacios 2
[ front view ]
DVIA-ML3000 for Glacios 2
[ rear view ]
DVIA-ML3000 for Glacios 2
[ Top view ]
DVIA-ML3000 for Glacios 2
[ whole setup 45-degree view ]
DVIA-ML3000 for Glacios 2
[ whole set front view ]
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DVIA-ML1000 Front Internal

Low-profile platform for SEM and TEM in space-constrained environments

The DVIA-ML series features a lower platform height than the previous models, providing increased clearance for tall electron microscopes in space-constrained environments.

DVIA-ML Costomizable size

Highly sensitive velocity sensors
for accurate vibration measurements

The DVIA-ML series features 11 Geophone velocity sensors with a high sensitivity of 2.55 V/in/s (100.4 V/m/s) to effectively detect low-velocity vibrations. The distortion <0.15% measured at 12 Hz with 0.7 in/s p-p displacement is very low which suggest the sensor will provide accurate measurements without introducing significant errors. Specially the velocity sensors with the higher damping value of 0.67 when loaded (20 kn), settle vibrations effectively in real-world applications.

Highly sensitive velocity sensors

Advanced sensor amplifier board circuit to obtain vibration signals down to around 0.3 Hz

The output of the GS-ONE is amplified using a specialized sensor amplifier board circuit that increases the gain specifically at low frequencies. This amplification ensures that the small low-frequency signals are more detectable and usable. In addition to this hardware-based amplification, a digital filter is applied to further enhance the signal. This filter is designed to boost the gain at low frequencies, correcting any attenuation that might otherwise occur. As a result of these hardware and software corrections, the GS-ONE output becomes effective for detecting and processing vibrations as low as around 0.3 Hz. This ensures that even low-frequency vibrations are captured accurately, enabling the active vibration isolation system to function optimally even at those frequencies. This elaboration emphasizes how both hardware (amplifier circuit) and software (digital filter) work together to enhance the low-frequency performance of the GS-ONE sensor. The advanced sensor amplifier board amplifies the gains of the velocity sensors at low frequencies, and the digital filter corrects these gains to effectively capture vibration signals down to approximately 0.3 Hz. This enables exceptional vibration isolation performance at 1 Hz

High-performance digital signal processor with 0.0005 seconds response time to vibration

The DVIA-ML series is equipped with a high-performance floating-point digital signal processor (DSP), delivering 1800 MFLOPS and 2400 MIPS for rapid and precise vibration response. It features 16-bit A/D converters with 19 channels and 24-bit D/A converters with 10 channels, ensuring accurate and synchronized data sampling. By leveraging advanced digital signal processing and precise converters, the system can detect and respond to vibrations with minimal delay, making it ideal for high-precision vibration isolation applications.

Less than 0.05μT Magnetic Field for optimal electron microscope performance.

The feedback control system constantly measures the isolated mass vibration and utilizes the electromagnetic actuators to create an equal and opposite force to attenuate vibration on the isolated mass. Although the isolation system works well out of the box, tuning the feedback open loops optimizes the isolation performance by adjusting the gains based on the isolated mass and using the new and advanced notch filters for accounting for structural resonances or vibration sources.

Magnetic Field graph

All-new feedback control enabling optimization of open loop tuning.

The DVIA-ML series is engineered to maintain an exceptionally low magnetic field of less than 0.05μT, which is crucial for preventing interference with the highly sensitive electron microscopes. Electron microscopes, particularly high-resolution models, are extremely sensitive to magnetic fields, as even small fluctuations can distort the electron beam and affect image clarity. By minimizing the magnetic field to such a low level, the DVIA-ML series ensures that electron microscopes can operate without the risk of magnetic interference, allowing for more precise and accurate imaging and measurements. This is particularly important for applications requiring nanometer or sub-nanometer resolution, where even minor disturbances can result in significant data inaccuracies.

Feedback Control DVIA-ML1000

Sophisticated feedforward control for dramatically Improved low-frequency vibration isolation performance.

The feedforward control uses real-time ground sensor measurements to detect vibration and sends a signal to the actuators to cancel floor vibration before floor vibration transmitting to the isolated mass. DVIA-ML feedforward control dramatically improves the vibration isolation performance. With the dynamic control, the feedforward control easily adapts to the changing vibration level in facilities and does not require constant re-tuning to deliver the outstanding performance.

Feedforward Control DVIA-ML1000

New PID tuning software,
more PID gains, filters
for stability and performance.

The new tuning software of DVIA-ML1000 provides more filters and gains to control vibration more efficiently. The number of filter slot has increased from 3 to 5 which allows us to delicately and accurately tune the active vibration isolation system. The new feedforward D gain and D frequency(Hz) provides excellent stability for tuning the active system below 10 Hz. Specially, we are able to attenuate vibration below 0.5 Hz with the new feedforward D gain control for the outstanding vibration isolation performance. The new tuning software provides the open-loop transfer function from 0.1 Hz enables us to accurately check the phase margin so that we can stably adjust gain values for the superior low frequency vibration isolation performance.

New PID tuning software

Active Vibration Isolation in
ALL Six Degrees of Freedom

The DVIA Series controls vibrations in three translational degrees of motions
( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).

Active Vibration Isolation in All Six Degrees of Freedom

Performance

DVIA-ML starts to isolate vibration from 0.5 Hz, providing 80 – 90% vibration isolation at 1 Hz.

Performance

Specifications

  • Model
    DVIA-ML1000
    DVIA-ML3000
  • Dimensions
    Customizable(fixed height:173 mm)
    Customizable(fixed height:178 mm)
  • Maximum Load Capacity
    1700kg
    3500kg
  • Vibration Isolation Technology
    Feedback and Feedforward Control
  • Degrees of Freedom
    6 Degrees
  • Active Isolation Bandwidth
    0.5 – 200 Hz
  • Vibration Isolation
    80 – 90% at 1 Hz
  • Actuator
    Electromagnetic Actuator
  • Maximum Actuator Force
    Vertical 40 N, Horizontal 20 N
  • Vibration Sensor
    Geophone, Sensitivity: 2.55 V/in/s (100.4 V/m/s) ± 10%
  • Leveling Repeatability
    Repeatability: ± 0.1 mm
  • Controller
    Built-in
  • Environmental Protection Requirements
    CE and TUV
  • Power Requirements
    Line Voltage: 100 – 260V AC, Line Frequency: 50/60 Hz
  • Air Requirements
    Air Pressure: 4 – 6 bar, Air Delivery: 10 L/min
  • Environmental Requirements
    Temperature: 5 – 50 °C, Humidity: 20 – 90 %

DVIA-ML1000 (Standard Platform)

DVIA-ML1000 with casters

DVIA-ML3000 for Thermo Fisher Krios G4

DVIA-ML3000 for Thermo Fisher Glacios2

DVIA-ML3000 for Thermo Fisher Tecnai TF20

DVIA-ML3000 for Thermo Fisher Spectra

DVIA-ML3000 for JEOL JEM-F200

Case Studies

Introduce DAEIL SYSTEMS' comprehensive range of vibration isolation systems
designed to minimize vibration and noise in various applications.

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