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대일시스템

대일시스템

Thermo Fisher Scientific Scios 2 DualBeam – FIB SEM
DVIA-MB1000 Installation Report

Installation Reports

• Introduction

This report provides the details of the installation of the MB1000 for the Thermo Fisher Scientific Scios 2 in Lab 123, , 2450 Mariner Square Loop, Alameda, CA 94501. Sila Nanotechnologies hired VEC to install the vibration isolation system and provide a report of the completed work.

• Summary Results

Below is a summary of the results:

  • MB1000 ON PASSED the Vibration specifications

• Product Details

Part Delivered Serial Number Software
MB1000 240213R2 Site-Specific Tune

• Summary of Work

We installed the system by

  • Positioning the daeil under the microscope
  • Leveling the daeil to within .5mm
  • Attaching seismic restraints between the floor and the daeil

 

We tested the system by

  • Creating and uploading a site-specific tune
  • Collecting vibration data to verify the performance

 

We left the system

  • In position and on

• Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200 with units of g (RMS). The acceleration spectra with 200 bandwidths were recorded.

• Setup

Vibration
Bandwidth 200
Lines 3200
Window Hanning
Coupling ICP 2mA
Average Type Stable
Duration 60
Engineering Units um/s (RMS)

• Specifications

VEC used the following specifications for the project.

Specification Summary

Tool Specification
Thermo Fisher Scientific Scios 2 Vibration
 All Directions
  SE-tool™ Spec Line g

Detailed Specifications

ACOUSTICS / FLOOR VIBRATIONS ADVISED REDUCTION FACTORS

Sila Nanotechnologires - Scios 2 110mmDC no HWL 1.0nm Multistub 0 Tilt - 11302023 10934 PM 13-15-36 (002)
Type Frequency Current Amplitude Advised Amplitude Reduction factor
1 Floor Vertical 2 Hz 7.3 0.58 13
2 Floor Vertical 3.15 Hz 6.4 0.62 10
3 Floor Vertical 2.5 Hz 5.9 0.60 9.9
4 Floor Vertical 4 Hz 7.7 1.2 6.3
5 Floor Left-to-Right 1.25 Hz 1.1 0.23 4.7
6 Floor Left-to-Right 1 Hz 0.84 0.18 4.6
7 Acoustics 315 Hz 48 dB 37 dB 3.7
8 Acoustics 630 Hz 45 dB 34 dB 3.5
9 Acoustics 200 Hz 45 dB 35 dB 3.4
10 Floor Vertical 1.6 Hz 1.9 0.56 3.3
11 Acoustics 125 Hz 55 dB 46 dB 2.9
12 Floor Vertical 5 Hz 6.8 2.5 2.8
13 Acoustics 500 Hz 44 dB 35 dB 2.8
14 Acoustics 160 Hz 53 dB 45 dB 2.4
15 Floor Vertical 6.3 Hz 7.8 3.9 2.0
16 Acoustics 80 Hz 55 dB 49 dB 1.9
17 Acoustics 1000 Hz 42 dB 38 dB 1.7
18 Floor Left-to-Right 0.8 Hz 0.53 0.31 1.7
19 Acoustics 100 Hz 56 dB 51 dB 1.7
20 Acoustics 800 Hz 42 dB 38 dB 1.6
21 Floor Left-to-Right 1.6 Hz 1.1 0.68 1.6
22 Acoustics 400 Hz 43 dB 39 dB 1.5
23 Floor Left-to-Right 0.63 Hz 0.42 0.32 1.3
24 Floor Vertical 8 Hz 9.1 7.0 1.3
25 Floor Vertical 1.25 Hz 0.60 0.52 1.2
26 Floor Left-to-Right 2.5 Hz 2.2 1.9 1.2
27 Floor Left-to-Right 2 Hz 1.3 1.2 1.1
28 Acoustics 250 Hz 39 dB 38 dB 1.1
29 Floor Left-to-Right 0.5 Hz 0.33 0.32 dB 1.0

• Results

Summary Results

Below is a summary of the results:

  • MB1000 PASSED the Vibration specifications
 

Detailed Results

Type Position Direction Specification Result
Vibration Floor Vertical SE-tool™ Spec Line g FAIL
Front-Back FAIL
Left-Right FAIL
DVIA-MB1000 Vertical PASS
Front-Back PASS
Left-Right PASS

• Data

Figure 1: Vibration (Vertical – Floor)

Specification: SE-tool™ Spec Line ;

Figure 2: Vibration (Vertical – MB1000)

Specification: SE-tool™ Spec Line ;

Figure 3: Vibration (Front-Back – Floor)

Specification: SE-tool™ Spec Line ;

Figure 4: Vibration (Front-Back – MB1000)

Specification: SE-tool™ Spec Line ;

Figure 5: Vibration (Left-Right – Floor)

Specification: SE-tool™ Spec Line ;

Figure 6: Vibration (Left-Right – MB1000)

Specification: SE-tool™ Spec Line ;

Figure 7: Final Result