Active Vibration Isolation Systems
Case Studies
Pneumatic Vibration Isolation Table Set point : 502.34 (nN)
Active Vibration Isolation Table(DVIA-T45) Set point : 563.25 (nN)
The line profile indicates that the nosie of the pneumatic vibration isolation tables is 10 times greater than
the active vibration isolation table and the cause of exccessive noise of the XE-100-02 due to the vibration isolation performance
difference between the pneumatic vibration isolation table and the active vibration isolation table.
The AFM XE-100-01 confirms that it is possible to measure fine samples of the
XE-100-02 with DAEIL SYSTEMS's tabletop active vibration isolation platform.