RAITH EBPG5150 E-Beam Lithography System DVIA-MB3000 Installation Report

Installation Reports

Summary Results
Summary of Work
Installer’s Notes
Procedures
– Vibration
Setup
Specifications
– Specification Summary
– Detailed Specifications
Results
– Summary Results
– Detailed Results
Data

• Summary Results

Below is a summary of the results:

MB3000 ON PASSED the Vibration specifications

This report details the installation of the Vibration Isolation MB3000 for the Raith EPBG5150 at Clean Room, Nanotech West Lab, 1381 Kinnear Road, Columbus, OH 43212.
Ohio State University hired VEC to install the MB3000 and provide a report of the completed work.

Product Details

Part Delivered	Serial Number	Software
MB3000	221130R3	Site-Specific Tune

• Summary of Work

We installed the system by

Positioning the Daeil under the microscope
Leveling the Daeil to within .5mm

We tested the system by

Creating and uploading a site-specific tune
Collecting vibration data to verify the performance

We left the system

In position and on
With “Auto Active” enabled

• Installer's Notes

The airline must be moved from nitrogen to compressed air for long-term use.

“Auto Active” has been enabled for this unit, so nothing needs to be done to the system after
power is restored in the event of power loss.

• Procedures

Vibration

VEC conducted vibration measurements in three directions. Acceleration measurements were
taken at a bandwidth of Hz with units of um/s. The acceleration spectra with Hz bandwidths were
recorded.

• Setup

Part Delivered
Bandwidth	Hz
Duration	seconds
Engineering Units	um/s

• Specifications

VEC used the following specifications for the project.

Specification Summary

Part Delivered
Raith EPBG515	Vibration All Directions 9 um/s 1Hz - 6Hz 9-20 um/s 6Hz - 30Hz 20-10 um/s 30Hz - 80Hz 10-100 um/s 80Hz - 800Hz

Detailed Specifications

Figure 1: Detailed Specification

• Results

Summary Results

Below is a summary of the results:

MB3000 ON PASSED the Vibration specifications

Detailed Results

Type	Position	Direction	Specification	Measurement	Result
Vibration	Floor	Front-Back	9 um/s 1Hz - 6Hz	2 um/s @ 4Hz	PASS
			9-20 um/s 6Hz - 30Hz	7 um/s @ 18Hz	PASS
			20-10 um/s 30Hz - 80Hz	1 um/s @ 58Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
		Left-Right	9 um/s 1Hz - 6Hz	3 um/s @ 6Hz	PASS
			9-20 um/s 6Hz - 30Hz	5 um/s @ 6Hz	PASS
			20-10 um/s 30Hz - 80Hz	2 um/s @ 58Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
		Vertical	9 um/s 1Hz - 6Hz	4 um/s @ 6Hz	PASS
			9-20 um/s 6Hz - 30Hz	7 um/s @ 18Hz	PASS
			20-10 um/s 30Hz - 80Hz	7 um/s @ 58Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
		Vertical (Walking)	9 um/s 1Hz - 6Hz	22 um/s @ 2Hz	FAIL
			9-20 um/s 6Hz - 30Hz	29 um/s @ 9Hz	FAIL
			20-10 um/s 30Hz - 80Hz	8 um/s @ 58Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
	MB3000	Front-Back	9 um/s 1Hz - 6Hz	0.717 um/s @ 5Hz	PASS
			9-20 um/s 6Hz - 30Hz	0.276 um/s @ 25Hz	PASS
			20-10 um/s 30Hz - 80Hz	0.804 um/s @ 45Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
		Left-Right	9 um/s 1Hz - 6Hz	0.648 um/s @ 5Hz	PASS
			9-20 um/s 6Hz - 30Hz	0.390 um/s @ 23Hz	PASS
			20-10 um/s 30Hz - 80Hz	0.742 um/s @ 45Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
		Vertical	9 um/s 1Hz - 6Hz	0.333 um/s @ 6Hz	PASS
			9-20 um/s 6Hz - 30Hz	0.602 um/s @ 17Hz	PASS
			20-10 um/s 30Hz - 80Hz	2 um/s @ 45Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS
		Vertical (Walking)	9 um/s 1Hz - 6Hz	2 um/s @ 2Hz	PASS
			9-20 um/s 6Hz - 30Hz	0.966 um/s @ 9Hz	PASS
			20-10 um/s 30Hz - 80Hz	3 um/s @ 45Hz	PASS
			10-100 um/s 80Hz - 800Hz		PASS