Active Vibration Isolation Systems
Case Studies
Service Report Number:
NSR-0063-DAE-JEOL-20210202
Date of Service:
2nd February 2021
Customer Information
Customer Organization : | JEOL Asia Pte Ltd |
End-user Contact : | Mr. Patrick Lim |
Address : | 2 Corporation Rd, #01-12 Lobby A of Corporation Place Singapore 618494 |
System Information
System / Model : | DAEIL DVIA-T56 Active Vibration Isolation Platform (Benchtop) |
System Serial Number : | 210112R11 |
Service Type : | Installation for JEOL JCM-7000 Tabletop SEM |
System Status : | Demo |
Job Summary
- Un-crate the platform and checks all parts for the active vibration isolation platform. Complete delivery without missing part/component.
- Positioned the DVIA-T56 under the JEOL JCM-7000 Tabletop SEM.
- Powered up the DVIA-T56 and performed auto load adjustment.
- Turned on isolation for the DVIA-T56.
- Performed remote tuning by DAEIL engineer for optimum performance.
- Performed vibration measurements on the table and base plate of the platform.
- Please refer to appendix A for the vibration plots for XYZ.
- Please refer to appendix B for the system images.
- Please refer to appendix C for the Gold on carbon images at 50kX and 100kX.
Conclusion:
Installation has been successfully completed and system performance is optimum for the T-56.
APPENDIX A: Vibration measurements for X, Y, Z
Appendix B: System images
Appendix C:
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1280 x 1024 (10s)
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1280 x 1024 (20s)
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2560 x 2048
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1280 x 1024 (10s)
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1280 x 1024 (20s)
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2560 x 2048
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