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대일시스템

대일시스템

JEOL Tabletop SEM

Active Vibration Isolation Systems

Case Studies

Service Report Number:

NSR-0063-DAE-JEOL-20210202

Date of Service:

2nd February 2021

Customer Information

Customer Organization : JEOL Asia Pte Ltd
End-user Contact : Mr. Patrick Lim
Address : 2 Corporation Rd, #01-12 Lobby A of Corporation Place
Singapore 618494
 

System Information

System / Model : DAEIL DVIA-T56 Active Vibration Isolation Platform (Benchtop)
System Serial Number : 210112R11
Service Type : Installation for JEOL JCM-7000 Tabletop SEM
System Status : Demo
 

Job Summary

  1. Un-crate the platform and checks all parts for the active vibration isolation platform. Complete delivery without missing part/component.
  2. Positioned the DVIA-T56 under the JEOL JCM-7000 Tabletop SEM.
  3. Powered up the DVIA-T56 and performed auto load adjustment.
  4. Turned on isolation for the DVIA-T56.
  5. Performed remote tuning by DAEIL engineer for optimum performance.
  6. Performed vibration measurements on the table and base plate of the platform.
  7. Please refer to appendix A for the vibration plots for XYZ.
  8. Please refer to appendix B for the system images.
  9. Please refer to appendix C for the Gold on carbon images at 50kX and 100kX.
 

Conclusion:

Installation has been successfully completed and system performance is optimum for the T-56.

 

APPENDIX A: Vibration measurements for X, Y, Z

 
x-axis_100Hz
x-axis_50Hz
y-axis_100Hz
y-axis_50Hz
z-axis_100Hz
z-axis_50Hz
 

Appendix B: System images

 
appendix_b-system_img-01
appendix_b-system_img-02
appendix_b-system_img-03
 
appendix_b-system_img-04
 

Appendix C:

 
 

Bare system

Daeil

1280 x 1024 (10s)

Bare system

1-baresystem_10s_1280x1024

Daeil

1-daeil_10s_1280x1024
 

1280 x 1024 (20s)

Bare system

1-baresystem_20s_1280x1024

Daeil

1-daeil_20s_1280x1024
 

2560 x 2048

Bare system

1-baresystem_2580x2048

Daeil

1-daeil_2580x2048
 
 

Bare system

Daeil

1280 x 1024 (10s)

Bare system

2-baresystem_10s_1280x1024

Daeil

2-daeil_10s_1280x1024
 

1280 x 1024 (20s)

Bare system

2-baresystem_20s_1280x1024

Daeil

2-daeil_20s_1280x1024
 

2560 x 2048

Bare system

2-baresystem_2580x2048

Daeil

2-daeil_2580x2048