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대일시스템

대일시스템

Hitachi Regulus 8230
DVIA-U350 Installation Report

Installation Reports

• Introduction

This report provides the details of the installation of the U350 for the Hitachi Regulus 8230 in 1Q14-01, Building 81, 974 East Arques Avenue, Sunnyvale, CA 94085. Applied Materials hired VEC to install the vibration isolation system and provide a report of the completed work.

• Summary Results

Below is a summary of the results:

  • U350 ON PASSED the Vibration specifications

• Product Details

Part Delivered Serial Number Software
U350 240614R2-4 -

• Summary of Work

We installed the system by

  • Positioning the daeil under the microscope

 

We tested the system by

  • Creating and uploading a site-specific tune
  • Collecting vibration data to verify the performance

 

We left the system

  • In position and on

• Procedures

Vibration

VEC conducted vibration measurements in six directions. Acceleration measurements were taken at a bandwidth of 200Hz with units of um (Pk-Pk). The acceleration spectra with 200Hz bandwidths were recorded.

• Setup

Vibration
Bandwidth 200Hz
Lines 3200
Window Hanning
Coupling AC SE
Average Type Stable
Duration 60 seconds
Engineering Units um (Pk-Pk)

• Specifications

VEC used the following specifications for the project.

Specification Summary

Tool Specification
Hitachi Regulus 8230 Vibration
 All Directions
  VC-D

• Results

Summary Results

Below is a summary of the results:

  • U350 ON PASSED the Vibration specifications
 

Detailed Results

Type Position Direction Specification Measurement Result
Vibration Floor Vertical VC-D VC-B FAIL
Left-Right VC-F PASS
Front-Back VC-G PASS
U 350 Vertical VC-E PASS
Left-Right VC-F PASS
Front-Back VC-E PASS

• Data

Figure 1: Vibration (Vertical – Floor)

Specification: VC-D; Measurement: VC-B; Result: Floor FAIL

Figure 2: Vibration (Vertical – U 350)

Specification: VC-D; Measurement: VC-E; Result: PASS

Figure 3: Vibration (Vertical – Transmissibility)

Figure 4: Vibration (Left-Right – Floor)

Specification: VC-D; Measurement: VC-F; Result: PASS

Figure 5: Vibration (Left-Right – U 350)

Specification: VC-D; Measurement: VC-F; Result: PASS

Figure 6: Vibration (Left-Right – Transmissiblilty)

Figure 7: Vibration (Front-Back – Floor)

Specification: VC-D; Measurement: VC-G; Result: PASS

Figure 8: Vibration (Front-Back – U 350)

Specification: VC-D; Measurement: VC-E; Result: PASS

Figure 9: Vibration (Front-Back – Transmissibility)