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대일시스템

대일시스템

TESCAN LYRA3 FIB-SEM
DVIA-MB1000 Installation Report

Installation Reports

1. Measurement Details

  • Measurement Date
    February 19, 2020
  • Measurement Devices
    1. LAN-XI Data Acquisition Hardware
    – Brüel & Kjæ r 3050-B-040
    2. Data Analysis Software
    – Brüel & Kjæ r PULSE LAB SHOP 14
    3. Sensors
    – PCB Accelerometer
    – Model: 393B05
  • Measurement Location
    2nd Floor

2. Equipment Information

  • Manufacturer
    TESCAN
  • Model
    LYRA3 FIB-SEM
  • Floor Vibration Specification
    < 10 μm/s below 30 Hz
    < 20 μm/s above 30 Hz

3. Vibration Isolation System Information
Model: DVIA-MB1000

DVIA-MB Base Active Vibration Isolation Platform
Platform Dimensions 1140 x 910 x 224 mm
Load Capacity 500 - 1700 kg
Actuator Electromagnetic Actuator
Maximum Actuator Force Vertical: 40N, Horizontal: 20 N
Degrees of Freedom 6 degrees
Active Isolation Range 0.5 - 100 Hz
Vibration Isolation at 2 Hz ≥90%
Vibration Isolation at 10 Hz ≥99%
Input Voltage (V) AC100 - 240V / 50 - 60 Hz / 1A
Power Consumption (W) Maximum 110W, <50 W in normal operation
Operating Range Temperature (°C) 5 - 50 °C
Humidity (%) 20 - 90%
Required Air Pressure ≥ 0.5 MPa

4. Installation Photos

DVIA MB1000 TESCAN LYRA3 FIB SEM

5. Summary

Vibration Criterion Curves
Frequency Range 1-10 Hz
Measurement Direction Z axis (Vertical) X axis (Left to Right) Y axis (Front to Back)
Floor Fail Fail Fail
On Active Vibration Isolation System Pass Pass Pass

6. Results
Z-axis (Vertical)

DVIA MB1000 TESCAN LYRA3 FIB SEM z-axis-vertical

X-axis (Left to Right)

DVIA MB1000 TESCAN LYRA3 FIB SEM x-axis-left-to-right

Y-axis (Front to Back)