Unparalleled performance that
outperforms all other systems.
The DVIA-ML series begins to isolate floor vibrations starting at 0.5 Hz,
achieving 90% vibration isolation at 1 Hz.
Active Vibration Isolation in
ALL Six Degrees of Freedom
The DVIA Series controls vibrations in three translational degrees of motions
( X, Y and Z) and three rotational degrees of motions ( pitch, roll and yaw).
Low-profile platform for SEM and TEM
in space-constrained environments
The DVIA-ML series features a lower platform height than the previous models,
providing increased clearance for tall electron microscopes in space-constrained environments.
Highly sensitive velocity sensors
for accurate vibration measurements
The DVIA-ML series features 11 Geophone velocity sensors with a high
sensitivity of 2.55 V/in/s (100.4 V/m/s) to effectively detect low frequency vibrations. The
distortion <0.15% measured at 12 Hz with 0.7 in/s p-p displacement is very low which suggest the
sensor will provide accurate measurements without introducing significant errors. Specially
the velocity sensors with the higher damping value of 0.67 when loaded (20 kn), settle
vibrations effectively in real-world applications.
Advanced sensor amplifier board
circuit to obtain vibration signals down to around 0.3 Hz
The output of the GS-ONE is amplified using a specialized sensor amplifier
board circuit that increases the gain specifically at low frequencies. This amplification
ensures that the small low-frequency signals are more detectable and usable.
In addition to this hardware-based amplification, a digital filter is applied to further enhance
the signal. This filter is designed to boost the gain at low frequencies, correcting any
attenuation that might otherwise occur.
As a result of these hardware and software corrections, the GS-ONE output becomes effective for
detecting and processing vibrations as low as around 0.3 Hz. This ensures that even
low-frequency vibrations are captured accurately, enabling the active vibration isolation system
to function optimally even at those frequencies. This elaboration emphasizes how both hardware
(amplifier circuit) and software (digital filter) work together to enhance the low-frequency
performance of the GS-ONE sensor. The advanced sensor amplifier board amplifies the gains of the
velocity sensors at low frequencies, and the digital filter corrects these gains to effectively
capture vibration signals down to approximately 0.3 Hz. This enables exceptional vibration
isolation performance at 1 Hz
High-performance digital signal
processor with 0.0005 seconds response time to vibration
The DVIA-ML series is equipped with a high-performance
floating-point digital signal processor (DSP), delivering 1800 MFLOPS and 2400
MIPS for rapid and precise vibration response. It features 16-bit A/D
converters with 19 channels and 24-bit D/A converters with 10
channels, ensuring accurate and synchronized data sampling. By leveraging advanced digital
signal processing and precise converters, the system can detect and respond to vibrations with
minimal delay, making it ideal for high-precision vibration isolation applications.
Less than 0.05μT Magnetic Field for optimal electron microscope performance.
The DVIA-ML series is engineered to maintain an exceptionally low magnetic field of less than 0.05μT,
which is crucial for preventing interference with the highly sensitive electron microscopes. Electron microscopes,
particularly high-resolution models, are extremely sensitive to magnetic fields,
as even small fluctuations can distort the electron beam and affect image clarity.
By minimizing the magnetic field to such a low level, the DVIA-ML series ensures that electron microscopes can operate without the risk of magnetic interference,
allowing for more precise and accurate imaging and measurements. This is particularly important for applications requiring nanometer or sub-nanometer resolution,
where even minor disturbances can result in significant data inaccuracies.
All-new feedback control enabling optimization of open loop tuning.
The feedback control system constantly measures the isolated mass vibration and utilizes the electromagnetic actuators to create an equal and
opposite force to attenuate vibration on the isolated mass. Although the isolation system works well out of the box, tuning the feedback open loops optimizes
the isolation performance by adjusting the gains based on the isolated mass and using the new and advanced notch filters for accounting for structural resonances or vibration sources.
Sophisticated feedforward control
for dramatically Improved low-frequency
vibration isolation performance.
The feedforward control uses real-time ground sensor measurements to detect
vibration and sends a signal to the actuators to cancel floor vibration before floor vibration
transmitting to the isolated mass. DVIA-ML feedforward control dramatically improves the
vibration isolation performance. With the dynamic control, the feedforward control easily adapts
to the changing vibration level in facilities and does not require constant re-tuning to deliver
the outstanding performance.
New PID tuning software,
more PID gains, filters
for stability and performance.
The new tuning software of DVIA-ML1000 provides more filters and gains to
control vibration more efficiently. The number of
filter slot has increased from 3 to 5 which allows us to delicately and accurately tune the
active vibration isolation system. The
new feedforward D gain and D frequency(Hz) provides excellent stability for tuning the active
system below 10 Hz. Specially,
we are able to attenuate vibration below 0.5 Hz with the new feedforward D gain control for the
outstanding vibration isolation
performance. The new tuning software provides the open-loop transfer function from 0.1 Hz
enables us to accurately check
the phase margin so that we can stably adjust gain values for the superior low frequency
vibration isolation performance.
