반도체 검사장비
​Semiconductor Metrology

• CD-SEM
• Photomask Repair
• Photomask Qualification
• Automated AFM
• Mask Aligner
• X-Ray Metrology
• X-Ray Defect Inspection
• E-Beam Lithography System

디스플레이 검사장비
​Flat Panel Display Metrology

• Non-Contanct 3D Surface Metrology
• Thin Film Thickness Metrology
• X-Ray Metrology

전자현미경
Electron Microscopy

• SEM – Scanning Electron Microscope
• TEM – Transmission Electron Microscope
• STEM – Scanning Transmission Electron Microscope
• STM – Scanning Tunneling Electron Microscope

광학 & 레이저
​Photonics & Laser

Microscopy

• 원자현미경
• 광학현미경
• 3D 광학현미경
• 형광현미경
• 디지털홀로그램 현미경
• 스타일러스 프로파일러
• 표면거친측정기

핵자기공명분광학
NMR Spectroscopy

• Nuclear Magnetic Resonance Spectroscopy

X-ray 분석기
​X-ray Metrology

• Single Crystal X-ray Diffraction